JPH0287075U - - Google Patents
Info
- Publication number
- JPH0287075U JPH0287075U JP16376188U JP16376188U JPH0287075U JP H0287075 U JPH0287075 U JP H0287075U JP 16376188 U JP16376188 U JP 16376188U JP 16376188 U JP16376188 U JP 16376188U JP H0287075 U JPH0287075 U JP H0287075U
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- reaction tube
- diffusion barrier
- elements
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000000470 constituent Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16376188U JPH0287075U (en]) | 1988-12-16 | 1988-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16376188U JPH0287075U (en]) | 1988-12-16 | 1988-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0287075U true JPH0287075U (en]) | 1990-07-10 |
Family
ID=31448773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16376188U Pending JPH0287075U (en]) | 1988-12-16 | 1988-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0287075U (en]) |
-
1988
- 1988-12-16 JP JP16376188U patent/JPH0287075U/ja active Pending